发明名称 |
Cryopump with improved second stage array |
摘要 |
A second stage cryopanel array suitable for both concentric refrigerators and side entry cryopumps is formed of two groups of semi-circular baffles mounted to respective L-shaped brackets. The array sections can be independently positioned about a second stage of a refrigerator.
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申请公布号 |
US4555907(A) |
申请公布日期 |
1985.12.03 |
申请号 |
US19840611689 |
申请日期 |
1984.05.18 |
申请人 |
HELIX TECHNOLOGY CORPORATION |
发明人 |
BARTLETT, ALLEN J. |
分类号 |
F04B37/08;(IPC1-7):B01D8/00 |
主分类号 |
F04B37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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