| 摘要 |
<p>PURPOSE:To obtain marking ink suitable for performing a probing in the semiconductor manufacturing processes of an LSI and a VLSI by a method wherein a hardening agent containing a chief agent consisting of a liquid silicone polymer and a liquid silane functional polymer is mixed with an inorganic pigment. CONSTITUTION:A hardening agent containing a chief agent consisting of a liquid silicone polymer and a liquid silane functional polymer is mixed with an inorganic pigment, and marking ink for semiconductor element is produced. The principal constituent is a silicone polymer containing a methyl group and the base is a polydimethyl silioxane type. The hardening agent is a liquid silicone polymer containing a silane functional polymer. The inorganic pigment, which is used as a colorant, consists of less than 1-muphi particle diameter pure carbon particles.</p> |
