| 摘要 |
PURPOSE:To obtain the mother plate for a regist master with which the 1st regist layer is hardly developed or not developed at all and remains at a uniform thickness after exposing and developing with a good yield by forming the 1st regist layer on a base plate then the 2nd regist layer having the photosensitivity higher than the photosensitivity thereof. CONSTITUTION:The mother plate of a regist master for producing a disc as a high-density recording medium is constituted by forming first the 1st regist layer 2 on a base plate 1 consisting of glass or metal, then forming the 2nd resist layer 3 thereon by using the resist having the photosensitivity higher than the photosensitivity of the layer 2. The (copolymer) of the monomer expressed by the formula (Y is H, CH3, CF3 or Cl, F, etc., R is -CH2C2F5, etc.) is used for the layer 2 and the polymer of the monomer expressed by the above-described formula in which Y is the same and R is -CH2F3, -C(R<1>)(R<2>)CF2CFHCF3, R<1>, R<2> are H or 1-3C alkyl is used for the layer 3. A pattern is thus drawn and developed by high energy rays such as a laser, electron rays, UV rays, etc. The mother plate on which the layer 2 remains at a uniform thickness and the surface of the plate 1 is not exposed and which has high sensitivity and high image resolution is thereby obtd. |
