| 摘要 |
<p>PURPOSE:To improve thermal responsiveness and durability for repeated use, by using an amorphous material which consists of a material containing halogen atoms derived from a substance of carbon atoms for heat-generating resistor layer. CONSTITUTION:A heat generating resistor layer 14 consists of amorphous material which contains halogen atoms derived from a parent body of carbon atoms, and either in singular or combined form of halogen atoms such as F, Cl, Br, I and etc. may be used. The heat generating resistor layer 14 is formed by a plasma CVD method as a glow discharge, or a vacuum sedimentation method such as sputtering etc. In order to control a halogen volume contained in the resistor 14 or characteristics of the later 14, a substrate temperature, a supply volume of raw material gas, a discharge power, a pressure in a sedimentation chamber or the like is suitably established. The above resistor layer has characteristics akin to diamond, and Vickers hardness of 1,800-5,000 may be obtained; and a liquid jet recording head with the above heat generating resistor layer has an extremely effective heat energy generated by a signal input provided to the liquid, resulting in an improved responsiveness.</p> |
