| 摘要 |
PURPOSE:To produce fine particulate Si3N4 containing much alpha-phase at a relatively low temperature, by heat-treating quenched Si pieces in an atmosphere containing N2. CONSTITUTION:Si melted by heating at about 1,450 deg.C and an inert gas, e.g. argon, are jetted from a nozzle on a cooling body, e.g. a rotating disk made of copper, and quenched at >=10<4> deg.C/sec cooling rate. The resultant flaky Si is then heated in an atmosphere containing N2 at about 1,250 deg.C, kept at the temperature for about 2hr, nitrided and then cooled to afford the aimed Si3N4 powder.
|
