发明名称 Method and structure for etching copper by a dry route
摘要 Method of corrosive attack on copper. The copper 13 is exposed to a gaseous or liquid oxidising agent in the presence of a catalyst which activates the reaction between the copper 13 and the oxidising agent. In some forms of embodiment the catalyst is carried by a medium which is also used to receive the oxidised copper compound produced by the reaction and in a preferred form of embodiment, the medium comprises a laminated structure consisting of a first layer 11 which contains a catalyst and a second layer 12 which receives the oxidised copper compound. The etching is mainly anisotropic, and this alleviates the problem of attack under the copper. Application to the production of printed circuit boards. <IMAGE>
申请公布号 FR2538003(A1) 申请公布日期 1984.06.22
申请号 FR19830020106 申请日期 1983.12.15
申请人 PSI STAR INC 发明人 NORVELL JOHN NELSON
分类号 C23F1/12;C23F1/14;H05K3/02;(IPC1-7):C23F1/02;H05K3/06 主分类号 C23F1/12
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