| 摘要 |
PURPOSE:To prevent infiltration of moisture into the surface of a gauge chip for a greater anticorrosivity by forming a thin film containing fluorine on the surface thereof on which an electrode is provided to lead out a signal having a pressure sensitive section. CONSTITUTION:A pressure sensor is so arranged to connect between a chip A electrode 11 and a hard frame 9 by a wire bonding with a metal wire 6 to draw an electrical signal. In this case, a fluorocarbon film 21 is formed on the surface of a silicon gel 7. With such an arrangement, a fluorocarbon film is also formed on the boundary between the metal wire 6 and the silicon gel 7 to prevent infiltration of moisture into the surface of a gauge chip thereby improving the anticorrosivity. |
