| 摘要 |
PURPOSE:To manufacture fluorinated grapite with superior water repellency and lubricity by causing electric discharge using graphite as an electrode in an atmosphere contg. gaseous fluorine or a compound having F in the molecular structure. CONSTITUTION:Electric discharge such as glow discharge, corona discharge, silent discharge or spark discharge is caused using graphite as at least one of electrodes in an atmosphere contg. gaseous fluorine or a compound having F in the molecular structure such as CF2Br2, SF6, CF4, CH3F or CH2F2. A fluorinated graphite film can be uniformly formed on the whole surface of the graphite as an electrode. |
