| 摘要 |
<p>PURPOSE:To enhance responsiveness and reliability, by contacting the outer surface of a heating member, which is supported by an insulated supporting member, with fluid, forming a hollow part in the inside, and measuring electric impedance of the part. CONSTITUTION:A hollow part 10 is formed at the central part of the inner side of a heating member 9 comprising a thermistor and the like. The member 9 is supported by a thermally and electrically insulated supporting member 11 comprising ceramic material and the like such as glass. Thus a heating body 1 is constituted. Al evaporated electrodes 12 at the outer end surface of the member 9 and bonding posts 14 made of a conductive material, which are pierced through the member 11, are connected by bonding wires 13 made of Al and the like. The outer surface of the member 9 is exposed to moving fluid. A current is supplied to the member 9 from the electrodes 12. Since the thermal capacity of the central part of the member 9 is small, the thermal response time becomes short.</p> |
