| 发明名称 |
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| 摘要 |
PURPOSE:To enable to position accurately by locating the center of the rising element and down element indicating above the rated value in removing as noise when the width between the rising element and down element of the detecting signal, which indicates the position shear of the objects to locate the position, indicate below the specified value. |
| 申请公布号 |
JPS5854408(B2) |
申请公布日期 |
1983.12.05 |
| 申请号 |
JP19770022924 |
申请日期 |
1977.03.03 |
| 申请人 |
FUJITSU KK;NIPPON DENSHIN DENWA KOSHA |
发明人 |
MUTO AKIFUMI;SUZUKI HIDEO;YONEDA MAMORU;SAITO TADAO;ISHIHARA SUNAO |
| 分类号 |
H01L21/30;G05D3/00;G05D3/12;H01L21/027;H01L21/68 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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