| 发明名称 |
Hinged glass photomask assembly |
| 摘要 |
A method and article are disclosed for facilitating repeated use in a photolithographic imaging process of a photomask assembly comprising a pair of glass plates by means of a flexible polymeric hinge permanently joining said pair of glass plates.
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| 申请公布号 |
US4412739(A) |
申请公布日期 |
1983.11.01 |
| 申请号 |
US19810224782 |
申请日期 |
1981.01.13 |
| 申请人 |
PPG INDUSTRIES, INC. |
发明人 |
FREIBERG, JAMES M. |
| 分类号 |
G03F1/14;H05K3/00;(IPC1-7):G03B27/04 |
主分类号 |
G03F1/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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