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发明名称	METHOD OF LITHOGRAPHY
摘要
申请公布号	SU1045312(A1)	申请公布日期	1983.09.30
申请号	SU19813362502	申请日期	1981.10.15
申请人	INST NEORGANICHESKOJ KHIMII SO AN SSSR	发明人	KORCHKOV VALERIJ P,SU;MARTYNOVA TATYANA N,SU;VASICHEV BORIS N,SU;POCHTAREV BORIS I,SU
分类号	H01L21/312;G03F7/26;(IPC1-7):H01L21/31	主分类号	H01L21/312
代理机构		代理人
主权项
地址

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