| 摘要 |
PURPOSE:To detect a component of displacement in each direction with high precision by elastically coupling a movable body displaced in a plane crossing a stylus axial line at right angles and the movable parts of a couple of displacement detectors in the plane together by leaf springs which cross mutually at right angles. CONSTITUTION:A fixed head 3 is fixed to a movable body 1 and in the head 3, a stylus 4 supported elastically by leaf springs 5 and 6 constitutes a differential transformer 7 as a Z-directional displacement detector. Lower ends of leaf springs 18 and 19 having prescribed widths in X-axis and Y-axis directions are fixed to the upper end part of the movable body, and coupling members 20 and 21 are fixed to their upper ends. The coupling members 20 and 21 cross in three dimensions over the movable body, and their one-side terminals are fixed to movable cores 25 and 24 of X and Y-directional displacement detectors 22 and 23 consisting of the differential transformer. The other-side terminals are fixed to oscillation dampers 34 and 35 respectively. |
