| 摘要 |
PURPOSE:To improve characteristics and to reduce the cost for manufacturing by flattening the entire surface of a magnetic layer by mechanical polishing after forming the magnetic layer thicker than the depth of the recessed part in a prescribed pattern, and removing a magnetic layer part, influenced by work strain, by etching. CONSTITUTION:A recessed part in a prescribed pattern is formed on a substrate 1 and a magnetic layer 2 thicker than the depth of the recessed part is formed. The magnetic layer is polished slantingly to form a surface 9, which is smoothed by ion milling or etching treatment to prescribed size, e.g. about 1mum depth to remove work strain, thus forming an ion-milled surface 10. Then, lower magnetic layers 2 and 3 are formed as a lower magnetic layer 4. On it, a coil 5 is provided and after an insulating packing material 6 is packed, an upper magnetic layer 7 is formed and then covered with a surface insulating layer 8. Consequently, products having superior characteristics are manufactured by eliminating work strain. |
