摘要 |
<p>PURPOSE:To obtain orientation suited for liquid crystals having an org. element of a-Si by forming a film of a silane compound having residual org. groups having at least a residual fluorine substituted hydrocarbon group and an alkoxyl group under the conditions of specific heating temp. and treating time. CONSTITUTION:A silane compound having residual org. groups having at least a residual fluorine substituted hydrocarbon group and an alkoxyl group, more preferably a silane compound expressed by the general formula (R is an alkyl group) is diluted with a fluorine type solvent and the soln. is coated on a substrate, and is dried, after which it is heat-treated under the following conditions: It is treated at the heating temps. and treating time existing within the region of the triangle formed by the three points consisting of the point (1.75, 0), the point (2.5, 0) and the point (1.75, 3.7) when these are plotted as the coordinates taking 1,000X (inverse number of absolute temp.) at the (x) axis and the natural logarithm Ink' of the ratio R' of the treating time to 300min at the (y) axis. Thereby, the loss of a function as a functional element of a-Si is obviated.</p> |