Process for producing oxides using chemical vapour deposition.

摘要

A process for producing oxides using chemical vapour deposition (C.V.D.) wherein simple or double oxides are obtained in film-on-substrate or fine powder form by using one kind or two kinds or more of gaseous metal beta -diketone complexes in conjunction with water vapour having bonded oxygen in a quantity more than equivalent sufficient for oxidizing a metal or metals contained in said complex or complexes.