| 摘要 |
PURPOSE:To improve the characteristics of a CVD film and to facilitate washing work for a reaction tube as well by a method wherein the reaction tube is formed in double configuration and reaction gas is flowed into the inner reaction tube and the inner reaction tube is provided with a pulley. CONSTITUTION:A reaction tube is made in double configuration with an inner reaction tube 14 and an exterior reaction tube 15 and reaction gas is directly flowed into the inner reaction tube 14 by a pipe 16. And the inner reaction tube 14 is provided with a pulley 17. And wafers 11 are set in the inner reaction tube 14 by a boat 12 and the inner reaction tube 14 with the pulley 17 is inserted as far as a predetermined position in the exterior reaction tube 15 by a leading rod 13. In this way, a CVD film is not formed at the exterior reaction tube 15. Therefore, silicon powder caused by the contact of the boat and the reaction tube at the time of taking the boat in and out will not be generated. Furthermore, the washing of the reaction tube may be applied to the inner reaction tube 14 only and can be performed wirh heating a heater 18. |
