摘要 |
A discharge-excited waveguide gas laser is disclosed utilizing a transverse rf excitation voltage at a frequency of at least about 30 MHz applied between elongated electrodes on opposite sides of the laser discharge chamber. A plurality of shunt inductances are coupled between the electrodes externally of the chamber at periodically spaced locations along the length of the chamber. These inductances provide a negative admittance which compensates for the variation in the phase angle of the transmission line reflection coefficient along the length of the laser discharge chamber. The variation in the magnitude of the standing wave voltage produced in the chamber by the excitation voltage is reduced accordingly, thereby improving the uniformity of the laser-exciting discharge. |