| 摘要 |
PURPOSE:To obtain an ion generator which hardly generates gas particles by perforating a penetrating hole at the position which is opposed to the aperture center of the second anode of the first cathode and also providing the second crossed field discharge device (discharger) and a vacuum device which supplies operative gas. CONSTITUTION:A pair of the first and second cathodes 13, 14 and 23, 24 are provided at the first and second crossed fields 10 and 20 so as to cover their openings by being separated from and approaching to anodes 11 and 21, anode hollow sections 12 and 22, and the two opening sections of the anodes. The anode 11 and the cathodes 13, 14 and the anode 21 and the cathodes 23, 24 are fixed, respectively and vacuum containers 15 and 25 which accommodate fixed feeding means that feed electric power to these electrodes, are arranged respectively. Besides, the vacuum container 15 is airtightly fixed to the vacuum device which uses an ion source through a flange 15a and can be divided by flanges 15b and 15c. As a result, the first crossed field discharger 10 can easily be assembled. |
