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发明名称
PREPARATION OF SINGLE CRYSTAL
摘要
申请公布号
JPS56164098(A)
申请公布日期
1981.12.16
申请号
JP19800066472
申请日期
1980.05.21
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
WASHITSUKA SHIYOUICHI
分类号
C30B15/00;C30B15/28;H01L21/02;H01L21/208
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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