| 摘要 |
PURPOSE:To enable the positioning of a long process with high accuracy and stability, by moving a moving section to a target through the use of a linear servo motor as a driving source. CONSTITUTION:A moving section 21 is clipped with a rail 22 by means of rollers 23 and it is located movably to a fixed section 20. Further, the magnet pole 24 of a linear servo motor is fitted to the moving section 21, and a stator coil 25 is fitted to the fixed section 20 opposingly. The magnet pole 24 is reacted with the magnetic field produced in the coil 25 to move the moving section 21. Moreover, the position of the moving section 21 is detected, and a voltage corresponding to the deviation with the objective value is fed to the coil 25 to produce an electromagnetic force with the magnetic pole 24. This is taken as the driving force to move the moving section 21 to the objective direction with the magnet pole 24. |
