发明名称 Tantalum oxide anti-reflective coating for silicon solar cells - prepd. by electron beam evapn. of mixt. of tantalum pent:oxide and tantalum
摘要 <p>A solar cell comprises (a) an Si body having opposed surfaces, one adapted for impingement of light, (b) a photovoltaic junction formed between the surfaces, dividing the body into opposite conductivity type zones and (c) an antireflective coating of Ta2Oy on the light impinging surface, where y = 2.5-4.8 (pref. 3.3 - 4.5) esp. 4.3. The anti-reflective coating is pref. 600-650 angstrom thick. The layer can be formed by electron beam evapn. from a mixt. of Ta2O5 and Ta metal and deposition thickness can be gauged by observation. The resulting coating of Ta2Oy can be heated in air for conversion to (near) stoichiometric Ta2O5 which is generally transparent to short wavelength light and has refraction index of 2.1-2.3. Power consumption is lower than for Ta evapn.</p>
申请公布号 DE2947647(A1) 申请公布日期 1981.07.30
申请号 DE19792947647 申请日期 1979.11.27
申请人 SOLAREX CORP. 发明人 LINDMAYER,JOSEPH
分类号 H01L31/0216;(IPC1-7):01L31/06 主分类号 H01L31/0216
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