摘要 |
<p>A solar cell comprises (a) an Si body having opposed surfaces, one adapted for impingement of light, (b) a photovoltaic junction formed between the surfaces, dividing the body into opposite conductivity type zones and (c) an antireflective coating of Ta2Oy on the light impinging surface, where y = 2.5-4.8 (pref. 3.3 - 4.5) esp. 4.3. The anti-reflective coating is pref. 600-650 angstrom thick. The layer can be formed by electron beam evapn. from a mixt. of Ta2O5 and Ta metal and deposition thickness can be gauged by observation. The resulting coating of Ta2Oy can be heated in air for conversion to (near) stoichiometric Ta2O5 which is generally transparent to short wavelength light and has refraction index of 2.1-2.3. Power consumption is lower than for Ta evapn.</p> |