| 摘要 |
PURPOSE:To eliminate the carbon lump adhered on a glass substrate without influence on other parts and to improve the characteristic of an electron tube, by processing a sintered cathode supporting parts in activated oxygen atmosphere. CONSTITUTION:Cathode supporting parts 4 having carbon lumps 9 adhered to a glass substrate 5 are arranged on a processing board 10 and placed in an oxygen plasma reaction chamber 11 then it is evacuated. Thereafter oxygen gas is injected to regulate the degree of vacuum and a device 12 will discharge high frequency output from an electrode 13 to the reaction chamber 11. Consequently the oxygen in the reaction chamber 11 is activated by the high frequency and reacts with the adhered carbon lumps 9 then exhausted as CO or CO2 through the reaction chamber 11. Consequently the carbon adhered on the substrate can be removed completely resulting in a parts having excellent characteristics. |
