| 摘要 |
PURPOSE:To reduce brooming, by placing the constituent elements of a plurality of photodiode arrays, which are provided in a semiconductor substrate, in insular regions separated from one another by separation regions and by using p-n junctions to separate the constituent elements from one another. CONSTITUTION:A plurality of photodiode elements having p-n junctions JA, JB,... for detection of light, which are made of n type layers 12A, 12B,... and p type layers 15A, 15B,..., are provided in insular regions separated from one another by separation layers 13 in a silicon substrate 11. The array constituting elements are separated from one another by p-n junctions KA, KB,... among the n type layers 12A, 12B,..., the p<+> type separation layers 13 and the p type silicon substrate 1. After phosphorus glass 17 is produced on the entire surface of photodiode arrays, openings for electrodes 18 are made and Al is coated as the electrodes by evaporation. Prescribed wirings are provided among the electrodes 18. Brooming is thereby reduced. |
