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发明名称
DETECTION OF BACKSCATTERED ELECTRONS
摘要
申请公布号
GB2050689(A)
申请公布日期
1981.01.07
申请号
GB19800014508
申请日期
1980.05.01
申请人
WETZLAR GMBH ERNST LEITZ
发明人
分类号
G01Q30/02;G01Q70/14;G01T1/28;H01J37/244;(IPC1-7):H01J37/26
主分类号
G01Q30/02
代理机构
代理人
主权项
地址
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