SOLAR BATTERY AND METHOD OF FABRICATING THE SAME

摘要

PURPOSE:To save the machining and power costs and the like of a solar battery and reduce the cost of the battery by employing polycrystal element material. CONSTITUTION:A polycrystalline silicon is formed by a low temperature plasma generating process. The polycrystalline silicon is adhered to the specimen 10 in plasma to form an n-type polycrystalline silicon film 20. Boron ion is implanted to the surface of the film 20 to form a region 21. The region 21 where ion is implanted by laser light 22 is uniformly heated. Thus, a pn junction is formed between the film 20 and the layer 21. A surface electrode 23 is then formed, and a surface reflection preventive film and a protective film are then formed thereon.