| 摘要 |
PURPOSE:To improve the transfer efficiency and speed of a charge coupled device by applying a drift field for accelerating charge carrier in transfer direction thereto during transfer cycle. CONSTITUTION:There are formed the first polycrystalline silicon electrode groups 13a, 13b,... disposed at predetermined interval, the second polycrystalline silicon electrode groups 21a, 21b,... electrically insulated via oxide films 14a, 14b,... for coating the upper surface, front and rear edges of the electrode groups 13a, 13b,..., and oxide films 22a, 22b selectively diffused on the second electrode groups to form low resistance diffused regions 23a', 23b, 23b', 23c,... for electric connections. The electric connectors formed at the front and rear edges of the electrodes 13a, 13b,... 21a, 21b,... in transfer direction are wired to common terminals 27, 28 and 29, 30, respectively. |
