发明名称 TEST METHOD AND TEST EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a technique to make search of a superior range for reflection performance easy in a reflection plane of a diffraction-type spatial light modulator.SOLUTION: A technique includes: a step S10 of acquiring a first reflection light volume value distribution by monitoring reflection light volume value of reflected light for a reflection region formed in a reflection plane of plural modulation units; a step S13 of providing a region in the reflection region which extends to a first direction and is a linear region narrower than the reflection region in a second direction perpendicular to the first direction; and a step S15 of acquiring characteristics information about a light volume value in the linear region on the basis of the first reflection light volume value distribution.SELECTED DRAWING: Figure 7
申请公布号 JP2016167017(A) 申请公布日期 2016.09.15
申请号 JP20150047355 申请日期 2015.03.10
申请人 SCREEN HOLDINGS CO LTD 发明人 ISO DAISUKE
分类号 G03F7/20;G02B5/08;G03F9/02 主分类号 G03F7/20
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