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发明名称
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要
申请公布号
JPS55108753(A)
申请公布日期
1980.08.21
申请号
JP19790015651
申请日期
1979.02.14
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
HIGASHINAKAGAHA IWAO
分类号
H01L21/768;H01L21/28
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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