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发明名称
APPARATUS FOR FORMING ORGANIC POLYMER THIN FILM UTILIZING PLASMA
摘要
申请公布号
GB2039923(A)
申请公布日期
1980.08.20
申请号
GB19800008402
申请日期
1979.07.25
申请人
TOKYO SHIBAURA DENKI KK
发明人
分类号
C08F2/00;B01J19/12;C08F2/46;C08F2/52;C08F2/54;C08J7/00;(IPC1-7):C08F2/52
主分类号
C08F2/00
代理机构
代理人
主权项
地址
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