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发明名称
TAKTGESTEUERTE MONOLITHISCH INTEGRIERBARE ABTASTSCHALTUNG
摘要
申请公布号
DE2853799(A1)
申请公布日期
1980.06.26
申请号
DE19782853799
申请日期
1978.12.13
申请人
SIEMENS AG
发明人
LUEDER,RAINER,DR.-ING.
分类号
H01L21/339;H01L29/76;H01L29/762;H03H15/00;H03H15/02;(IPC1-7):H03H7/28
主分类号
H01L21/339
代理机构
代理人
主权项
地址
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