| 摘要 |
PURPOSE:Cured SiOx coating films are formed on the surface of plastic transparent moldings by the high-frequency ion plating method, thus giving cured SiOx coating films free from releasing and cracking. CONSTITUTION:Transparent plastic material 8 that is supported by base holder 9 equipped with electrode 10 on the back surface and boat 15 containing SiOx (x is 1-2) as the vapor source and arranged in vacuum tank 14 of a high-frequency ion plating unit and the transparent plastic material 8 is heated with halogen lamp heater 12 to 60-110 deg.C. Then, an inert gas is introduced into tank 14 and the pressure of the gas is adjusted to 10<-3>-10<-5>Torr. Subsequently, high-frequency power 4 of incidental RF power 50-200W and accelerating voltage 0.25-2.0KV is applied to RF coil 5 to effect the high-frequency discharge and generate the ions of the inert gas. At the same time, a direct current is applied to electrode of vaporizer 1, net electrode 10 to heat the vapor source 2 and vaporize it. The vaporized particles are ionized to form cured SiOx coating film on the surface of the transparent plastic material 8. |
