| 摘要 |
PURPOSE:To dispense with pinhole inspection, by providing an accessory light-intercepting metal film on the reverse side of a metal mask for a reticle, which has another light-intercepting metal film on the obverse side a glass plate. CONSTITUTION:A metal mask 7 for a reticle has a pattern-making metal film 9 on one side of transparent glass plate 8 and an accessory metal film 10 on the other side. It is very rare that pinholes occur in corresponding positions in the films on the obverse and reverse sides. Therefore, the probability of production of a mask defective due to the occurrence of pinholes in such positions is extremely low. |
