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发明名称
HIGH FREQUENCY SPUTTERING APPARATUS
摘要
申请公布号
EP0003020(A3)
申请公布日期
1979.08.22
申请号
EP19780101476
申请日期
1978.11.30
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BIALKO, JOSEPH ALFON;LECHATON, JOHN S.
分类号
C23C14/04;C23C14/34;C23C14/40;C23C14/44;C23C14/50;(IPC1-7):H01J37/34
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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