PRODUCTION OF SILICON SEMICONDUCTOR DEVICE,申请号JP19770140035-传众专利搜索

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发明名称	PRODUCTION OF SILICON SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS5473556(A)	申请公布日期	1979.06.12
申请号	JP19770140035	申请日期	1977.11.24
申请人	HITACHI LTD	发明人	MOCHIZUKI YASUHIRO;YATSUNO KOUMEI
分类号	H01L21/223;H01L21/225	主分类号	H01L21/223
代理机构		代理人
主权项
地址

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