发明名称 POSITION CORRECTING MECHANISM
摘要 <p>PURPOSE:To make possible position correction of the plane XY directions and rotating directions of table, etc. with one hand by making the chessman for performing position correction of the XY directions rotatable about operating shaft and transmitting the revolutions thereof to the moving part for operation. CONSTITUTION:The movements in the XY directions of a chessman 1 are transmitted by way of a first operating shaft 4, a nuiversal joint 5 and a second operating shaft 9 to the first link 7 of a pantagraph 6 and are transmitted to a moving part 31 for operation via the arm 25 and working table 26 fixed to a third link 15. On the other hand, the revolutions of the chessman 1 are transmitted to the second pulley 24 at the end of the second link 14 by way of a drive pulley 44 and a timing belt 45. A timing belt 43 is put on the pulleys 42, 28, 41 which form a parallelogram together with the first pulley 23 revolving integrally with said pulley and therefore the revolutions transmitted thereby to a third pulley 28 are transmitted as revolutions to the moving part 31 for operation by way of the revolving shaft 27 in the arm 25, deive pulley 29, timing belt 33 and driven pulley 32.</p>
申请公布号 JPS5456377(A) 申请公布日期 1979.05.07
申请号 JP19770122395 申请日期 1977.10.14
申请人 HITACHI LTD;HITACHI ELECTR ENG 发明人 YAMAMOTO SHIYUNICHI;SUGAWA TAKU;ARASAKI SHIGEO
分类号 H01L21/68;H01L21/60 主分类号 H01L21/68
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