| 发明名称 |
ETCHING METHOD FOR INDIUM PHOSPHORUS SINGLE CRYSTAL TO MIRROR FACE |
| 摘要 |
PURPOSE:To obtain the title mirror face with little residual scratches due to polishing and pin holes by carrying out etching with a soln. of sulfuric acid or phosphoric acid contg. a specified amt. of H2O2, or an aq. soln. of nitric acid or sulfuric acid and further carrying out etching wtih a bromine-contg. soln. of alcohols, acetone or acetic acid.
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| 申请公布号 |
JPS5413500(A) |
申请公布日期 |
1979.01.31 |
| 申请号 |
JP19770078491 |
申请日期 |
1977.07.02 |
| 申请人 |
FUJITSU LTD |
发明人 |
NISHITANI YORIMITSU;AKITA KENZOU |
| 分类号 |
C30B33/00;C01B25/08;C30B33/10;H01L21/304;H01L21/306;H01L21/308 |
主分类号 |
C30B33/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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