| 发明名称 |
Single crystal wafer and solar battery cell |
| 摘要 |
The present invention provides a single crystal wafer, wherein the main surface has a plane or a plane equivalent to a plane tilting with respect to a Ä100Ü axis of single crystal by angles of alpha (0 DEG < alpha < 90 DEG ) for the Ä011Ü direction, beta (0 DEG < beta < 90 DEG ) for the Ä01-1Ü direction and gamma (0 DEG </= gamma < 45 DEG ) for the Ä10-1Ü or Ä101Ü direction. Thus, a single crystal wafer that can sufficiently bear device production processes even with a small wafer thickness is provided and thereby loss of single crystal raw material is reduced. Further, by using such a wafer, MIS type semiconductor devices and solar cells are provided at a low cost. <IMAGE> |
| 申请公布号 |
AU6946901(A) |
申请公布日期 |
2002.01.21 |
| 申请号 |
AU20010069469 |
申请日期 |
2001.07.06 |
| 申请人 |
SHIN-ETSU HANDOTAI CO.,LTD. |
发明人 |
TADAHIRO OHMI;SHIGETOSHI SUGAWA;TATSUO ITO;KOICHI KANAYA |
| 分类号 |
C30B29/06;C30B15/00;H01L21/02;H01L21/28;H01L21/316;H01L29/51;H01L31/028;H01L31/036;H01L31/04 |
主分类号 |
C30B29/06 |
| 代理机构 |
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代理人 |
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