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经营范围
发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5314580(A)
申请公布日期
1978.02.09
申请号
JP19760088161
申请日期
1976.07.26
申请人
HITACHI LTD
发明人
KOSA YASUNOBU;WADA YASUO
分类号
H01L29/78;H01L21/28;H01L21/3205;H01L21/336;H01L21/40;H01L27/04
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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