Selected methylol-substituted trihydroxybenzophenones and their use in phenolic resin compositions and processes of forming resist images

摘要

A methylol-substituted trihydroxybenzophenone of the formula (I): <IMAGE> (I) This methylol-substituted trihydroxybenzophenone may be reacted with selected phenolic monomers during or after the formation of a phenolic novolak resin thereby said resin having at least one unit of formula (II): <IMAGE> (II) wherein R and R1 are individually selected from hydrogen, a lower alkyl group having 1 to 4 carbon atoms or a lower alkoxy group having 1 to 4 carbon atoms.