发明名称 |
Apparatus for exposing a photosensitive beltlike material |
摘要 |
Apparatus for exposing an image of a desired pattern, such as a lead frame pattern for producing lead frames of IC devices, with a predetermined pitch on a photosensitive beltlike material consisting of a film carrier and a photoresist-coated metallic foil laminated on the carrier.
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申请公布号 |
US4049345(A) |
申请公布日期 |
1977.09.20 |
申请号 |
US19760672383 |
申请日期 |
1976.03.31 |
申请人 |
DAINIPPON SCREEN SEIZO KABUSHIKI-KAISHA |
发明人 |
TANABE, OSAMU;NISHIZAWA, HISAO;HATA, KAZUO |
分类号 |
G03B27/46;G03B27/58;H05K3/00;(IPC1-7):G03B27/52;G03B27/32 |
主分类号 |
G03B27/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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