发明名称 Apparatus for exposing a photosensitive beltlike material
摘要 Apparatus for exposing an image of a desired pattern, such as a lead frame pattern for producing lead frames of IC devices, with a predetermined pitch on a photosensitive beltlike material consisting of a film carrier and a photoresist-coated metallic foil laminated on the carrier.
申请公布号 US4049345(A) 申请公布日期 1977.09.20
申请号 US19760672383 申请日期 1976.03.31
申请人 DAINIPPON SCREEN SEIZO KABUSHIKI-KAISHA 发明人 TANABE, OSAMU;NISHIZAWA, HISAO;HATA, KAZUO
分类号 G03B27/46;G03B27/58;H05K3/00;(IPC1-7):G03B27/52;G03B27/32 主分类号 G03B27/46
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