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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5299086(A)
申请公布日期
1977.08.19
申请号
JP19760016211
申请日期
1976.02.17
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
SATOU KAZUO;UENO SABUHIRO
分类号
H01L29/78;H01L21/76
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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