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发明名称
APPARATUS FOR PLASMA TREATMENT AT LOW TEMPEBATURE
摘要
申请公布号
JPS5275985(A)
申请公布日期
1977.06.25
申请号
JP19750152977
申请日期
1975.12.22
申请人
TOUKIYOU OUKA KOUGIYOU KK;OOKA INSUTSURUMENTO KK
发明人
KAWAMURA KATSUFUMI;UEHARA AKIRA;KOJIMA KENICHI;NAKANE HISASHI
分类号
G03F7/00;B41N1/00;H01L21/302;H01L21/3065
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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