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发明名称
PROCESS OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5228279(A)
申请公布日期
1977.03.03
申请号
JP19750097487
申请日期
1975.08.13
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
YONEYAMA TERUO;OKUYAMA NOBORU;NAKASONE HIROSHI;IIZUKA YASUO
分类号
H01L29/78;H01L21/768
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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