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发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPS5219958(A)
申请公布日期
1977.02.15
申请号
JP19750096354
申请日期
1975.08.07
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MATSUURA SHIZUYA
分类号
H01J37/06;H01J1/15
主分类号
H01J37/06
代理机构
代理人
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