| 摘要 |
PURPOSE:To control the power in high performance by controlling the speed by making the phases of two frequency voltages different from each other and by using the force information in detected information as a feedback signal. CONSTITUTION:An ultrasonic actuator 5 is driven from a variable frequency oscillator 1 through a phase variable circuit 2 and power amplification circuits 3 to 4. A force control loop is composed of a force information detector 6, a force amplifier 7, a comparison computing element 9, a compensating filter 8, a phase variable circuit 2, power amplification circuits 3 to 4. When the phase difference between two frequency voltages is in the range of 0 deg. and 90 deg., the traveling wave condition of an oscillating body is approximately proportional to the speed. Thus, by changing this phase difference, an apparent force is controlled. |
