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发明名称
PLASMA DEVICE
摘要
申请公布号
JPH0336274(A)
申请公布日期
1991.02.15
申请号
JP19890168815
申请日期
1989.06.30
申请人
SONY CORP
发明人
SATO JUNICHI
分类号
C23C14/34;C23C16/50;C23C16/511;C23F4/00;H01L21/31
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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