| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the useless space in a heat treatment unit group wherein cool plates and hot plates are laminated and arranged in many rows. SOLUTION: A cool plate CP4 is equipped with a treatment chamber 73 surrounding an aluminum plate 70 and a machine chamber 74 for arranging cylinders or the like whose chambers are divided by a partition 72. The treatment chamber 73 is isolated from a vacant space in the upper part of the cool plate CP4 by a bottom plate above the chamber 73. In the machine chamber 74, a partition body 90 for dividing further a part region of the chamber 74 is disposed upright between the bottom plate 71 of the cool plate CP4 and the other bottom plate 71 above the treatment chamber 73. The inner region of the machine chamber 74 is divided into a first chamber 91 and a second chamber 92. In the vacant space, an electric apparatus and a chemical liquid tank are arranged. Electric wires and chemical liquid supply pipes 93 from them are wired and piped from the vacant space, through the bottom plate 71 and the second chamber 92. |
