SEMICONDUCTOR ELEMENT WITH ANALOG TRANSISTOR IMPROVED IN WHICH OPERATING CHARACTERISTIC AND FLICKER NOISE CHARACTERISTIC, AND METHOD FOR MANUFACTURING IT

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor element in which operating characteristics and the flicker noise characteristics of transistors are improved. SOLUTION: The semiconductor element comprises: a substrate; an analog nMOS transistor and a compressive strain channel pMOS transistor on the substrate; and first and second etching stopper liners which cover the nMOS and the pMOS transistors, respectively. In the nMOS and the pMOS transistors, relative values of flicker noise power at 500Hz with respect to each reference non-strain channel analog nMOS and pMOS transistor are 1 or smaller. COPYRIGHT: (C)2008,JPO&INPIT