INTEGRIERTER ELEKTRONISCHER SENSOR FÜR PHYSIKALISCHE GRÖSSEN UND HERSTELLUNGSVERFAHREN DAFÜR

摘要

PCT No. PCT/FR94/01141 Sec. 371 Date Mar. 1, 1996 Sec. 102(e) Date Mar. 1, 1996 PCT Filed Sep. 29, 1994 PCT Pub. No. WO95/09367 PCT Pub. Date Apr. 6, 1995The integrated electronic sensor for characterizing physical quantities comprises a substrate (5) having a characterizing member (3) and a cover (9) maintained in the vicinity of and in front of the characterizing member (3) by means of at least one ball (11) bearing on the substrate (5), so as to provide a first spacing between the cover (9) and the substrate and is characterized in that the cover has a boss (15) facing the characterizing member (3) so as to define a second spacing between the cover (9) and the member, which is smaller than the spacing between the cover and the substrate.